Description
i-Line StepperConfiguration
StepperOEM Model Description
The NSR-2005i10C is a stepper that uses an I-line light source with a wavelength of 365 nanometers. It achieves a resolution of 0.45 micron or better over a wide exposure area of 22mm x 22mm to 17.9mm x 25.2mm. With an optional feature called Shrine (Super High Resolution by Illumination Control), the resolution can be improved to 0.35 micron or better. This stepper is capable of mass-producing 16Mbit DRAMs at its normal resolution of 0.45 micron.Documents
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Verified
CATEGORY
Steppers & Scanners
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139220
Wafer Sizes:
8"/200mm
Vintage:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2005i9C
CATEGORY
Steppers & Scanners
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139220
Wafer Sizes:
8"/200mm
Vintage:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
i-Line StepperConfiguration
StepperOEM Model Description
The NSR-2005i10C is a stepper that uses an I-line light source with a wavelength of 365 nanometers. It achieves a resolution of 0.45 micron or better over a wide exposure area of 22mm x 22mm to 17.9mm x 25.2mm. With an optional feature called Shrine (Super High Resolution by Illumination Control), the resolution can be improved to 0.35 micron or better. This stepper is capable of mass-producing 16Mbit DRAMs at its normal resolution of 0.45 micron.Documents
No documents