Description

No description

Configuration

<FOCUS> Best Focus( µ m) 0.051 AngleX/Y /P /R(µ rad) 0.62/4.36/2.64/3.52 Max-Min (µ m) 0.28 Curvature ( µ m) - 0.094 UR-LL/UL-LR(µ m) 0.103/ 0.077 <DISTORTION> MaxX/MinX/MaxY/MinY (n m) 0.029/-0.046/0.025/-0.062

OEM Model Description

The NSR-2005i10C is a stepper that uses an I-line light source with a wavelength of 365 nanometers. It achieves a resolution of 0.45 micron or better over a wide exposure area of 22mm x 22mm to 17.9mm x 25.2mm. With an optional feature called Shrine (Super High Resolution by Illumination Control), the resolution can be improved to 0.35 micron or better. This stepper is capable of mass-producing 16Mbit DRAMs at its normal resolution of 0.45 micron.

Documents

No documents

NIKON

NSR-2005i9C

Verified

Steppers & Scanners

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

124161

Wafer Sizes:

Unknown

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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