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CANON FPA-3000i4
    Description
    No description
    Configuration
    Suitable for variety of wafer types: Silicon, Silicon Carbide, Gallium Nitride, and all other Compound Semi substrates as well as clear wafers. Reticle size: 6" Square Field Size: 22 X 22 mm Exposure Light: 365nm Light Source: 2.0KW Super High Pressure Hg Lamp Projection Magnification: 1/5 X Numerical Aperture: 0.63~0.45 Estimated Throughput: 59 wph (60 shot / 22 mm / 8” Wafer) 83 wph (32 shot / 22 mm / 6" Wafer) illumination data taken in July 2024: Uniformity : 0.921% Intensity : 9,916 w/m
    OEM Model Description
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
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    CANON

    FPA-3000i4

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: Over 30 days ago

    Key Item Details

    Condition:

    Refurbished


    Operational Status:

    Unknown


    Product ID:

    117147


    Wafer Sizes:

    4"/100mm, 6"/150mm, 8"/200mm


    Vintage:

    1998


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    CANON FPA-3000i4

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    FPA-3000i4

    Steppers & Scanners
    Vintage: 1995Condition: Used
    Last VerifiedYesterday

    CANON

    FPA-3000i4

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: Over 30 days ago
    listing-photo-31144eca4bdb4ea9bb998d9e38dd0121-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1370/31144eca4bdb4ea9bb998d9e38dd0121/68bde39f2c1646a5adfa944757ade173_8b1efae3ae434905ab5a6bc0ffbdf0ba1201a_mw.jpeg
    listing-photo-31144eca4bdb4ea9bb998d9e38dd0121-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1370/31144eca4bdb4ea9bb998d9e38dd0121/46ab77ccdc48438385a6b32a5b882524_ca4106d48c104ad2a0cd763c6bb0fb0d1201a_mw.jpeg
    listing-photo-31144eca4bdb4ea9bb998d9e38dd0121-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1370/31144eca4bdb4ea9bb998d9e38dd0121/d8e8e22d5ab74b6b91d30dba788da726_8d238c929023455c9d7ef48df6c51c0c1201a_mw.jpeg
    listing-photo-31144eca4bdb4ea9bb998d9e38dd0121-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1370/31144eca4bdb4ea9bb998d9e38dd0121/4d724a7bfbd64065831bd382c25fca8e_4dbac654a8e94ddf8493099c8c34d7f31201a_mw.jpeg
    Key Item Details

    Condition:

    Refurbished


    Operational Status:

    Unknown


    Product ID:

    117147


    Wafer Sizes:

    4"/100mm, 6"/150mm, 8"/200mm


    Vintage:

    1998


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Suitable for variety of wafer types: Silicon, Silicon Carbide, Gallium Nitride, and all other Compound Semi substrates as well as clear wafers. Reticle size: 6" Square Field Size: 22 X 22 mm Exposure Light: 365nm Light Source: 2.0KW Super High Pressure Hg Lamp Projection Magnification: 1/5 X Numerical Aperture: 0.63~0.45 Estimated Throughput: 59 wph (60 shot / 22 mm / 8” Wafer) 83 wph (32 shot / 22 mm / 6" Wafer) illumination data taken in July 2024: Uniformity : 0.921% Intensity : 9,916 w/m
    OEM Model Description
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
    Documents

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