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ASML PAS 5500/1150C

Description

w/ 2x2 cassette/transfer loader 1ea Cymer NL7600A NanoLith laser system, 400V, 70A 1ea mains power cabinet; 1ea Donaldson P199100 LithoGuard filtration unit 1ea Rietschle Thomas SAH 55 (10) exhaust blower; 1ea Rietschle Thomas REL 44050 (23) exhaust blower cabinet; 1ea Quality Power Solutions uninterruptible power system w/ battery pack; 1ea Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA. 120in x 72in x 99in H.

Configuration

Details Attached

OEM Model Description

The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.

Documents

asml_.txt

asmlpas_5500:1150C.txt

asml_pas.txt

pas.txt

5500:1150C.txt

pas5500_1150c.txt

asml_pas_5500_1150c.txt

asml_pas.txt

asml.txt

asmlpas.txt

ASML

PAS 5500/1150C

verified-listing-icon

Verified

CATEGORY

Steppers & Scanners

Last Verified: 5 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

146954

Wafer Sizes:

Unknown

Vintage:

2006

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

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CATEGORY

Steppers & Scanners

Last Verified: 5 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

146954

Wafer Sizes:

Unknown

Vintage:

2006

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

w/ 2x2 cassette/transfer loader 1ea Cymer NL7600A NanoLith laser system, 400V, 70A 1ea mains power cabinet; 1ea Donaldson P199100 LithoGuard filtration unit 1ea Rietschle Thomas SAH 55 (10) exhaust blower; 1ea Rietschle Thomas REL 44050 (23) exhaust blower cabinet; 1ea Quality Power Solutions uninterruptible power system w/ battery pack; 1ea Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA. 120in x 72in x 99in H.

Configuration

Details Attached

OEM Model Description

The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.

Documents

asml_.txt

asmlpas_5500:1150C.txt

asml_pas.txt

pas.txt

5500:1150C.txt

pas5500_1150c.txt

asml_pas_5500_1150c.txt

asml_pas.txt

asml.txt

asmlpas.txt

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ASML PAS 5500/1150C

ASML

PAS 5500/1150C

Steppers & ScannersVintage: 0Condition: UsedLast Verified:5 days ago

ASML PAS 5500/1150C

ASML

PAS 5500/1150C

Steppers & ScannersVintage: 0Condition: UsedLast Verified:Over 60 days ago