
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131562
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500/1150C
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131562
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.Documents
No documents