Description
New: Controller, Valves, Sensors, Tubes Pipes Refrubished: Process Chamber, Tanks 2 Heated Tanks EKC,NMP or similar 2 Unheated Tanks IPA or similar 4 Trebor Pumps (electrical pumps on request) 8 Inch Rotor, One Bolt Quick Disconnect, Carrier A192-81M-0215Configuration
No ConfigurationOEM Model Description
The Spray Solvent Tool (SST) is a compact, efficient system that enhances chemical reactions on wafer surfaces. It employs mechanical and centrifugal forces to achieve uniform coverage on both sides of the wafer. The closed loop process control ensures consistent results, while continuous recycling and filtration of chemicals reduce waste. The SST offers precise temperature control and flexibility in chemical delivery methods. With its high throughput, small footprint, and operator safety features, it provides reliable and low-maintenance operation. The tool supports various processes, including GaAs clean, metal lift-off, photoresist removal, post-etch residue removal, and thin film heads. It utilizes technologies such as copper RDL and pillar structures. Flexibility - featuring two, four, or seven tank configuration in small footprint cabinet; process chambers, product carriers, and quick-disconnect rotors are available for wafers up to 200mmDocuments
No documents
SEMITOOL
SST 421
Verified
CATEGORY
Spray Solvent / Acid
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
106135
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEMITOOL
SST 421
CATEGORY
Spray Solvent / Acid
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
106135
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
New: Controller, Valves, Sensors, Tubes Pipes Refrubished: Process Chamber, Tanks 2 Heated Tanks EKC,NMP or similar 2 Unheated Tanks IPA or similar 4 Trebor Pumps (electrical pumps on request) 8 Inch Rotor, One Bolt Quick Disconnect, Carrier A192-81M-0215Configuration
No ConfigurationOEM Model Description
The Spray Solvent Tool (SST) is a compact, efficient system that enhances chemical reactions on wafer surfaces. It employs mechanical and centrifugal forces to achieve uniform coverage on both sides of the wafer. The closed loop process control ensures consistent results, while continuous recycling and filtration of chemicals reduce waste. The SST offers precise temperature control and flexibility in chemical delivery methods. With its high throughput, small footprint, and operator safety features, it provides reliable and low-maintenance operation. The tool supports various processes, including GaAs clean, metal lift-off, photoresist removal, post-etch residue removal, and thin film heads. It utilizes technologies such as copper RDL and pillar structures. Flexibility - featuring two, four, or seven tank configuration in small footprint cabinet; process chambers, product carriers, and quick-disconnect rotors are available for wafers up to 200mmDocuments
No documents