Description
No descriptionConfiguration
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM Model Description
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ZEISS / CARL ZEISS
1560
Verified
CATEGORY
SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
96898
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ZEISS / CARL ZEISS
1560
CATEGORY
SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
96898
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM Model Description
None ProvidedDocuments
No documents