Description
Variable pressure SEMI Type II stage high resolution of 3.0nm (SED image in high vacuum mode at 30kV) and 4.0nm (BSED image in VP mode at 30kV), this SEM supports magnification from 5X to 300,000X. The large chamber accommodates specimens up to 200mm in diameter, with motorized 5-axis eucentric stage for precise sample positioning.Configuration
Resolution 3.0nm (SED image, High Vacuum, 30kV) 4.0nm (BSED image, Variable Pressure, 30kV) Magnification Range 5X to 300,000X Chamber & Stage Specimen size: up to 200mm diameter X Traverse: 80mm (Type I), 100mm (Type II) Y Traverse: 40mm (Type I), 50mm (Type II) Z Traverse: 5–35mm (Type I), 5–65mm (Type II) Rotation: 360° Continuous Tilt Range: -20° to +90° Max Sample Height: 40mm (Type I), 85mm (Type II) Motorization: Manual, 5-axis eucentric Detectors SE Detector: Everhart-Thornley BSE Detector: Five-segment solid-state, compositional/topographic/3D modes Electron Source Pre-centered tungsten hairpin type Accelerating Voltage 300V to 30kV Vacuum System Turbomolecular pump: 210 liter/sec Rotary pump: 162 liter/min Variable Pressure Range: 6Pa to 270Pa Chamber pump down time: ~90 seconds Automatic Functions Brightness/Contrast Control (ABCC) Focus Control (AFC) Stigmator and Focus Control (ASF) Filament Saturation (AFS) Beam Alignment (ABA) Beam Setting (ABS) Objective Aperture Alignment (AAA) Auto Beam Blanking Display & Imaging 19” LCD monitor Signal mixing (BSE, SE, ESED) Display modes: Standard, Full screen, Real-Time Dual Image Scan modes: TV rate, Fast Scan, Slow Scan, Photo Scan, Reduced Area Scan Image Saving & Processing Pixel resolutions: 640x480, 1280x960, 2560x1920, 5120x3840 Frame integration: 2 to 1024 frames SEM Data File Manager, PCI Image Management System Image formats: BMP, JPG, TIF, GIF, PSD, etc. Pseudo color, digital zoom, contrast/brightness, cropping, resizing, gamma control, edge enhancement Measurement & Annotation Text, graphics, measurements on live or saved images Data edging, 3D Birds Eye View Operator Assist Stage memory (Type II): up to 200 positions Move stage to saved positions Image navigator 3D maintenance videos Condition save files Magnification presets Power & Safety Auto transformer: 100–220V, single-phase, 2.0kVA Safety interlocks Rapid start: 6 minutes from cold start Anti-vibration systemOEM Model Description
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HITACHI
S-3400N
CATEGORY
SEM / FIB
Last Verified: 15 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
146125
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Variable pressure SEMI Type II stage high resolution of 3.0nm (SED image in high vacuum mode at 30kV) and 4.0nm (BSED image in VP mode at 30kV), this SEM supports magnification from 5X to 300,000X. The large chamber accommodates specimens up to 200mm in diameter, with motorized 5-axis eucentric stage for precise sample positioning.Configuration
Resolution 3.0nm (SED image, High Vacuum, 30kV) 4.0nm (BSED image, Variable Pressure, 30kV) Magnification Range 5X to 300,000X Chamber & Stage Specimen size: up to 200mm diameter X Traverse: 80mm (Type I), 100mm (Type II) Y Traverse: 40mm (Type I), 50mm (Type II) Z Traverse: 5–35mm (Type I), 5–65mm (Type II) Rotation: 360° Continuous Tilt Range: -20° to +90° Max Sample Height: 40mm (Type I), 85mm (Type II) Motorization: Manual, 5-axis eucentric Detectors SE Detector: Everhart-Thornley BSE Detector: Five-segment solid-state, compositional/topographic/3D modes Electron Source Pre-centered tungsten hairpin type Accelerating Voltage 300V to 30kV Vacuum System Turbomolecular pump: 210 liter/sec Rotary pump: 162 liter/min Variable Pressure Range: 6Pa to 270Pa Chamber pump down time: ~90 seconds Automatic Functions Brightness/Contrast Control (ABCC) Focus Control (AFC) Stigmator and Focus Control (ASF) Filament Saturation (AFS) Beam Alignment (ABA) Beam Setting (ABS) Objective Aperture Alignment (AAA) Auto Beam Blanking Display & Imaging 19” LCD monitor Signal mixing (BSE, SE, ESED) Display modes: Standard, Full screen, Real-Time Dual Image Scan modes: TV rate, Fast Scan, Slow Scan, Photo Scan, Reduced Area Scan Image Saving & Processing Pixel resolutions: 640x480, 1280x960, 2560x1920, 5120x3840 Frame integration: 2 to 1024 frames SEM Data File Manager, PCI Image Management System Image formats: BMP, JPG, TIF, GIF, PSD, etc. Pseudo color, digital zoom, contrast/brightness, cropping, resizing, gamma control, edge enhancement Measurement & Annotation Text, graphics, measurements on live or saved images Data edging, 3D Birds Eye View Operator Assist Stage memory (Type II): up to 200 positions Move stage to saved positions Image navigator 3D maintenance videos Condition save files Magnification presets Power & Safety Auto transformer: 100–220V, single-phase, 2.0kVA Safety interlocks Rapid start: 6 minutes from cold start Anti-vibration systemOEM Model Description
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