THERMOFISHER SCIENTIFIC / FEI / PHILLIPS NOVA NANOSEM 600

Description

Spare Parts None available

Configuration

Model Nova NanoSEM 600 w/ Gatan MonoCL Software Version 1.3.5 Build 758 Process SEM/CL Wafer Config & Size 150mm wafers and pieces, Partial analysis of 200mm wafers Chillers one closed-loop chiller, Haskris Roughing Pump Edwards 10i roughing pump UPS Toshiba SEM detectors (internal) Everhart-Thornley SE (1) and Thru-the-Lens Detector (1) SEM detectors (external) Helix (1), Low Vacuum Detector (1) & Gaseous Analytical (1) Cathodoluminescece (CL) Detector Gatan MonoCL3 Chamber Plasma Cleaner XEI Scientific Evactron E50 Chamber Decontaminator

OEM Model Description

The Nova NanoSEM 600 is a type of high-resolution scanning electron microscope (SEM) that comes equipped with SED, BSED, and STEM detectors. It is a Dual Beam SEM/FIB system that combines the capabilities of ultra-high resolution field emission Scanning Electron Microscopy (SEM) with the precision of Focused Ion Beam (FIB) etching and deposition, making it ideal for nanoscale prototyping, machining, characterization, and analysis. When operating in STEM mode, this microscope can achieve a resolution as low as 1 nanometer. Additionally, the Nova NanoSEM 600 is capable of operating under low vacuum conditions and offers a range of analytical options including EBSD and EDS.