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    Key Item Details


    Operational Status:unknown

    Product ID:59210

    Wafer Sizes:8"/200mm



    Upgrade and Remanufacturing Compatible Technology Service with New Industrial Controller and Digital 1/0 Controller including Windows GUI scheduler SW, WPH Upgraded, New Spin Motor/Driver and New Servo Motor/Driver for INR & WTR Robots Wafer Level Recipe Processing and Command, Real Time Process Log Online Communication (SECS/GEM) Option with real time wafer & lot tracking Inch Conversion (4/5/6/8") for both Silicon Wafer and LED Sapphire Substrate


    Wafer Spin Scrubbing/Cleaning

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    OEM Model Description

    The SS-W80A-AR is a double-side scrubber that responds to the strict processing needs for the next-generation processes with complete contamination control and the latest precision processing capacity. The body is compact allowing installation space to be greatly reduced. Attention has also been paid to the operability, maintenance and safety. The SS-W80A-AR supports 8-inch wafers

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