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Marketplace > Resistivity / Four Point Probe > KLA > RS55
KLA

RS55

Category
Resistivity / Four Point Probe
Overview

The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.

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