Description

No description

Configuration

KLA RS55 Probe head - 'A' Type

OEM Model Description

The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.