The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.

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OmniMap RS55

The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.

OmniMap RS75

The OmniMap® RS75 series is a tool designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. The RS75 series is offered in a variety of configurations to meet customer production requirements, including automated and manual versions, both of which are available with or without temperature compensation. Models include the Auto RS75/tc, RS75/tc, Auto RS75, and the RS75.

Resistivity / Four Point Probe

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Manufacturers of Resistivity / Four Point Probe

Top Products for Resistivity / Four Point Probe

OmniMap RS55

OmniMap RS75

OmniMap RS75/TCA

ResMap 273