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ULVAC SIV-500
    Description
    • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV 500 - Manual load. (1) 500mm x 500mm carrier - Uses Ulvac 12· cryo & 12' water pump/turbo
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    ULVAC

    SIV-500

    verified-listing-icon

    Verified

    CATEGORY
    PVD / Sputtering

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    128837

    Wafer Sizes:

    6"/150mm

    Vintage:

    2015

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    ULVAC

    SIV-500

    verified-listing-icon
    Verified
    CATEGORY
    PVD / Sputtering
    Last Verified: Over 30 days ago
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/fb097bb3932e428abd43267340f57c27_8f38a05d81fc4a8c9f0a9ca510bfd10c_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/fbc9041505894381aad8cb4d7e08fc80_d800460e11fe4d23b776a3178255a015_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/babc2c906bfe47cea8da84670c2197ce_84bddeb283bb40d4b96f92c51a76d806_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/c1f328c4b4f04be38c2f45cb1334ef7b_225de08f309d4681bfeb41462218cd211201a_mw.jpeg
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    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/4bd57a3046654d93bd3ba0fedfa9627d_c6887918942944dba5c6ddd2a1778b6c_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/51e204b9521143fca8a7bf3ceb2f9f3b_d5549442a9644085810ff37d7cafef1a_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/389b0803bbf344b1a9d0c442ab7118d3_70b9fb49e6e944caafc1c30b4ce7fd31_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/30ca6e55907d44d686946d22f2572c75_f4f01f0c405e4a8382132ec98d771349_mw.jpeg
    listing-photo-3e01a3a30d5e4b8faf8fdb05b9059bad-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2792/3e01a3a30d5e4b8faf8fdb05b9059bad/36d1f5c4b78143e391b0ae22606d7c42_3d187c2f5bb84556947137b788db80a9_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    128837

    Wafer Sizes:

    6"/150mm

    Vintage:

    2015

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV 500 - Manual load. (1) 500mm x 500mm carrier - Uses Ulvac 12· cryo & 12' water pump/turbo
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    ULVAC SIV-500

    ULVAC

    SIV-500

    PVD / SputteringVintage: 2015Condition: UsedLast Verified:Over 30 days ago
    ULVAC SIV-500

    ULVAC

    SIV-500

    PVD / SputteringVintage: 0Condition: UsedLast Verified:Over 60 days ago
    ULVAC SIV-500

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    PVD / SputteringVintage: 2012Condition: UsedLast Verified:Over 60 days ago