ULVAC

SIV-500	

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• 3-station process module (P1. P2. P3)
• 5 KW pulsed DC power supply
• P3 dedicated to ITO or other Transparent Conductive Films <TCF)
• P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry
• L/L: has a roughing pump and water pump
• Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump

SIV 500
- Manual load. (1) 500mm x 500mm carrier
- Uses Ulvac 12· cryo & 12' water pump/turbo

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SIV-500

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