Description
No descriptionConfiguration
974i Sputter System and Options: Si Doped Reactive Option 974i NEW KDF (includes Four std. 24.4" planar cathodes) WaterPump CTI MDL 550 Upgrade 10" Process Cryo To Osaka Mag-Lev TgKine 3304MBWB-B Turbo Delete Four 24.4" Planar Cathodes Add Three 24.4" LMM Linear Moving Magnetron Cathodes for Si Doped Reactive Add One 24.4" MU Inset Cathode Four Piece Cathode for Chrome Upgrade to Tri-Sputter with Three 10Kw Pinnacle Plus Pulse DC Capability Upgrade to three Reactive Gas Rings and 7 Mass Flow Meter Balance Control 6 for Tri-Sput Tri-Sput ActiveFlow Balance control Delete Moving Shutter Install Fixed Shutters RF Option AE Dressler 3.0Kw RF Etch One Spare Shield set Three Spare LMM DSS Dark Space Shields One Spare MU Dark Space Shield Front & Rear Haynes 242 Alloy Chain Shields two sets H2O Cooled Anode Plate H2O Cooled Chamber Plates Four Cool Plates For Dark Space Shields LMM & MU IR Substrate Temp Monitor Variable Emissivity in Recipie Option: Upgrade Ion Gauges on Cryo & Turbo Using MKS 909AR read only Light Tower Two Edwards iLX Dry Rough Pumps Cathode Removal Tool CE Certified & Semi S2-0200 & NFPA 79 Two Flat SS PalletsOEM Model Description
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KDF / MRC
974i
CATEGORY
PVD / Sputtering
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132319
Wafer Sizes:
Unknown
Vintage:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
974i Sputter System and Options: Si Doped Reactive Option 974i NEW KDF (includes Four std. 24.4" planar cathodes) WaterPump CTI MDL 550 Upgrade 10" Process Cryo To Osaka Mag-Lev TgKine 3304MBWB-B Turbo Delete Four 24.4" Planar Cathodes Add Three 24.4" LMM Linear Moving Magnetron Cathodes for Si Doped Reactive Add One 24.4" MU Inset Cathode Four Piece Cathode for Chrome Upgrade to Tri-Sputter with Three 10Kw Pinnacle Plus Pulse DC Capability Upgrade to three Reactive Gas Rings and 7 Mass Flow Meter Balance Control 6 for Tri-Sput Tri-Sput ActiveFlow Balance control Delete Moving Shutter Install Fixed Shutters RF Option AE Dressler 3.0Kw RF Etch One Spare Shield set Three Spare LMM DSS Dark Space Shields One Spare MU Dark Space Shield Front & Rear Haynes 242 Alloy Chain Shields two sets H2O Cooled Anode Plate H2O Cooled Chamber Plates Four Cool Plates For Dark Space Shields LMM & MU IR Substrate Temp Monitor Variable Emissivity in Recipie Option: Upgrade Ion Gauges on Cryo & Turbo Using MKS 909AR read only Light Tower Two Edwards iLX Dry Rough Pumps Cathode Removal Tool CE Certified & Semi S2-0200 & NFPA 79 Two Flat SS PalletsOEM Model Description
None ProvidedDocuments
No documents