Description
Tool Configuration: - MAG7 Brooks Robots - MC3 Novellus Module controller - Pfeiffer Turbo and turbo controller - 3 CTI/Hilex/Brooks Cryo pump - Brooks FOUP cassette wafer loader - VAT throttle valve and controllers - AE PDX 5000 RF Generator - AE RFG 5500 RF Generator - MKS RF Generator - DC power supply - Right Degas Chamber - PVD chamber - Preclean Chamber - Left Degas Chamber - Transfer Module with dual blade - And many more (details attached)Configuration
PVDOEM Model Description
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).Documents
LAM RESEARCH / NOVELLUS
INOVA xT
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
64064
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
LAM RESEARCH / NOVELLUS
INOVA xT
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
64064
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available