Description
Sputter DepConfiguration
PVDOEM Model Description
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).Documents
No documents
LAM RESEARCH / NOVELLUS
INOVA xT
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
40312
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
INOVA xT
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
40312
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Sputter DepConfiguration
PVDOEM Model Description
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).Documents
No documents