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6" Fab For Sale from Moov - Click Here to Learn More
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EVATEC / UNAXIS / OERLIKON / BALZERS CLUSTERLINE 200
    Description
    Last processed 6” wafer was Oct’21, currently the tool is not running with power-off condition.
    Configuration
    6" , can be upgraded to 8" 2 chambers SiO2 Clusterline machine that consist of 2x LL(LoadLock/Loading module) + TM(transfer module) + 1x Aligner(detect wafer flat) + 2x PM(process chamber) + 3x Degasser. The process chamber had run gases of O2, SF6, Ar, He, N2O, N2, NH3, SiH4, H2. Only process chamber was deposited with Silicon Nitride/Silicon Oxide
    OEM Model Description
    None Provided
    Documents

    No documents

    EVATEC / UNAXIS / OERLIKON / BALZERS

    CLUSTERLINE 200

    verified-listing-icon

    Verified

    CATEGORY
    PVD / Sputtering

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Installed / Running

    Product ID:

    102898

    Wafer Sizes:

    6"/150mm, 8"/200mm

    Vintage:

    2011

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    EVATEC / UNAXIS / OERLIKON / BALZERS CLUSTERLINE 200

    EVATEC / UNAXIS / OERLIKON / BALZERS

    CLUSTERLINE 200

    PVD / Sputtering
    Vintage: 2011Condition: Used
    Last VerifiedOver 30 days ago

    EVATEC / UNAXIS / OERLIKON / BALZERS

    CLUSTERLINE 200

    verified-listing-icon
    Verified
    CATEGORY
    PVD / Sputtering
    Last Verified: Over 30 days ago
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/901e0a9bc81d49d3be0196d530968eb3_76d7cda9ee1342778a3cb170069f3bcc1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/d74c21c0fed14537b7958f564d1b1469_8d5269196f3f477bb2ad3a6b452491ec1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/0bba004c5be547e893405f6186e906e1_d2d9920344fe45d196683c5169ac7a631201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/969ad94d9760439ebcb5d44ead112fd7_f0208d8c649a4319a5c2f33260c34e1c_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/854254f6e00f42f6935ddf1086edb5dc_9bbd819243114fac8925a6d7b03f0f5c1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/565d8f2bc4f549b39f854554f888b8f2_dc30db5ad9464e788e6957bdef59ecdd1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/1cf50331765c432ab4a3407ea287e7f8_d01a7ad30c4d43249e3f851691d98cbf1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/918bb33117bb41f6b37ce7d3f6345a7c_8468d0ffddcb449c9db8ffc993b583521201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/72fc1db4eb5947828ee82faf5de3c654_317307c32af94f4f8bc28013fcc25e54_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Installed / Running

    Product ID:

    102898

    Wafer Sizes:

    6"/150mm, 8"/200mm

    Vintage:

    2011

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Last processed 6” wafer was Oct’21, currently the tool is not running with power-off condition.
    Configuration
    6" , can be upgraded to 8" 2 chambers SiO2 Clusterline machine that consist of 2x LL(LoadLock/Loading module) + TM(transfer module) + 1x Aligner(detect wafer flat) + 2x PM(process chamber) + 3x Degasser. The process chamber had run gases of O2, SF6, Ar, He, N2O, N2, NH3, SiH4, H2. Only process chamber was deposited with Silicon Nitride/Silicon Oxide
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    EVATEC / UNAXIS / OERLIKON / BALZERS CLUSTERLINE 200

    EVATEC / UNAXIS / OERLIKON / BALZERS

    CLUSTERLINE 200

    PVD / SputteringVintage: 2011Condition: UsedLast Verified:Over 30 days ago