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PLASMA-THERM SLR 770
    Description
    No description
    Configuration
    ICP SILICON DEEP ETCHING Ion Coupled Plasma Etcher System * Load lock shuttle lock transfer * Single chamber ICP MFC: HORIBA SEC-E40 4EA PROCESS GAS: O2, Ar, SF6, C4F6 RFPP * RF POWER PRODUCTS RFPP I22050001 & I20050007 ADAPTIVE PRESSURE CONTROLLER * VAT PM-5 Heater Controller * Plasma-Therm * PC & OS * Plasma-Therm PC OS * RF POWER PRODUCTS RFPP RF5S & AM-5 * SEREN R3001 Turbo Pump * LEYBOLD MAG 2000 Turbo Pump Controller * LEYBOLD MD 2000
    OEM Model Description
    None Provided
    Documents

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    PLASMA-THERM

    SLR 770

    verified-listing-icon

    Verified

    CATEGORY
    Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Deinstalled

    Product ID:

    57347

    Wafer Sizes:

    4"/100mm

    Vintage:

    1998

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    PLASMA-THERM SLR 770

    PLASMA-THERM

    SLR 770

    Plasma Etch
    Vintage: 1998Condition: Used
    Last VerifiedOver 60 days ago
    PLASMA-THERM SLR 770

    PLASMA-THERM

    SLR 770

    Plasma Etch
    Vintage: 0Condition: Refurbished
    Last VerifiedOver 60 days ago
    PLASMA-THERM SLR 770

    PLASMA-THERM

    SLR 770

    Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    PLASMA-THERM

    SLR 770

    verified-listing-icon
    Verified
    CATEGORY
    Plasma Etch
    Last Verified: Over 60 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Deinstalled

    Product ID:

    57347

    Wafer Sizes:

    4"/100mm

    Vintage:

    1998

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    ICP SILICON DEEP ETCHING Ion Coupled Plasma Etcher System * Load lock shuttle lock transfer * Single chamber ICP MFC: HORIBA SEC-E40 4EA PROCESS GAS: O2, Ar, SF6, C4F6 RFPP * RF POWER PRODUCTS RFPP I22050001 & I20050007 ADAPTIVE PRESSURE CONTROLLER * VAT PM-5 Heater Controller * Plasma-Therm * PC & OS * Plasma-Therm PC OS * RF POWER PRODUCTS RFPP RF5S & AM-5 * SEREN R3001 Turbo Pump * LEYBOLD MAG 2000 Turbo Pump Controller * LEYBOLD MD 2000
    OEM Model Description
    None Provided
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