Description
No descriptionConfiguration
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM Model Description
None ProvidedDocuments
No documents
PLASMA-THERM
SLR 770
Verified
CATEGORY
Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
14081
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMA-THERM
SLR 770
CATEGORY
Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
14081
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM Model Description
None ProvidedDocuments
No documents