Description
Polysilicon EtchConfiguration
No ConfigurationOEM Model Description
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.Documents
No documents
LAM RESEARCH CORPORATION
AUTOETCH 490
Verified
CATEGORY
Plasma Etch
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
100621
Wafer Sizes:
6"/150mm
Vintage:
Unknown
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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LAM RESEARCH CORPORATION
AUTOETCH 490
Verified
CATEGORY
Plasma Etch
Last Verified: 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
100621
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Polysilicon EtchConfiguration
No ConfigurationOEM Model Description
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.Documents
No documents
Similar Listings
View AllLAM RESEARCH CORPORATION
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Plasma EtchVintage: 0Condition: UsedLast Verified: Over 60 days agoLAM RESEARCH CORPORATION
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Plasma EtchVintage: 0Condition: UsedLast Verified: Over 60 days agoLAM RESEARCH CORPORATION
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