The model 2244i and Saturn Wafer Stepper feature an i-line illumination specification that is designed to make them compatible with advanced i-line reduction steppers.

Veeco Instruments Inc. a global leader of advanced thin film etch and deposition process equipment, acquired Ultratech, Inc. a leading supplier of lithography, laser-processing and inspection systems used to manufacture semiconductor devices and LEDs.


VEECO / ULTRATECH

2244i

-Wafer Size : 2 inch to 8 inch
-Resolution : 0.75um standard
-Field Size: 44mm x 22mm

-Resolution 0.75um.
-Stepper is currently set up for 6” wafer but can be modified easily to an 8”

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2244i.MOV

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2244i

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