Our flagship, the EUV-MBR is a stand alone tool for automated characterization of multilayers and absorbers
of EUV masks and mask blanks based on our well

RI develops and manufactures high-performance components, and systems, and provides solutions for scientific and industrial applications

RESEARCH INSTRUMENTS

EUV MBR

EUV mask and mask blank reflectometer (EUV-MBR)
Stand-alone EUV mask blank reflectometer

Distinctive EUV-MBR properties 
• Wavelength accuracy better than 2 pm
• Small Spot down to < 250 x 100 μm2
• 2000 spectral channels of 1.7 pm width.
• Less than 20 seconds exposure time for measuring full spectrum at small spot with full resolution
• Precision on CWL_50 < 1 pm
• Precision on reflectivity: < 0.1% abs.
• Accuracy on reflectivity: < 0.3 % abs.
• Resolution limit on absorbers: < 0.1 %
• Fiducial mark referenced positioning
• Direct quantification of scatter and flare.

29F729A8-8D5A-459D-97B6-A625FA991789_1_201_a.jpeg

A1428F03-A86D-4213-95CB-A0F620DF6C38_4_5005_c.jpeg

E50F61E6-78BF-4027-98A2-B2819D79BE12_1_201_a.jpeg

8A1709FD-AC1F-416E-8942-BF040164DF16_1_201_a.jpeg

D07E00AE-9D37-4D14-9C30-AEF8812672A4_4_5005_c.jpeg

6416A28D-517D-49A5-8E7F-B6CF2699F687_1_201_a.jpeg

163DEABB-A179-49F9-AC99-D7ECA61D0B1E_4_5005_c.jpeg

F2484BCC-B4D8-4031-8461-DC468480C735_1_201_a.jpeg

B8316232-9A39-48E6-998C-E5093518CFA5.jpeg

FA73F76F-1982-451A-B5E2-20F9C83DB868_1_201_a.jpeg

EUV MBR

Category

Overview

Active Listings

Services

Top Listings

List it with Moov and find the perfect buyer in no time at all.