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The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.Documents
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KLA / THERMA-WAVE
OP-2600
Verified
CATEGORY
Metrology
Last Verified: 24 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102733
Wafer Sizes:
8"/200mm
Vintage:
1997
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / THERMA-WAVE
OP-2600
CATEGORY
Metrology
Last Verified: 24 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102733
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.Documents
No documents