
Description
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Axcelis Axcelis Purion M - Implant 200mm convertible: Yes Dimensions & weight estimates: Mainframe dim (cm): 360 x 810 x 310OEM Model Description
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.Documents
No documents
AXCELIS
PURION M
CATEGORY
Medium Current
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132401
Wafer Sizes:
6"/150mm
Vintage:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Axcelis Axcelis Purion M - Implant 200mm convertible: Yes Dimensions & weight estimates: Mainframe dim (cm): 360 x 810 x 310OEM Model Description
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.Documents
No documents