Description
Medium Current Ion ImplanterConfiguration
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM Model Description
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.Documents
No documents
AXCELIS
PURION M
CATEGORY
Medium Current
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132929
Wafer Sizes:
6"/150mm
Vintage:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Medium Current Ion ImplanterConfiguration
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM Model Description
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.Documents
No documents