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μPG 101
Category
LithographyOverview
UPG The μPG 101 is an easy-to-use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, and Micro Fluidics. -Substrates up to 100 x 100 mm2 -Critical dimension resolution is 3 μm -Address grid down to 120 nm for the 3 μm. -Multiple data input formats (DXF, CIF, BMP) -Camera system for alignment
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