In 2000, Eaton spun off Axcelis as a separate company, and Axcelis inherited Eaton’s 50-percent ownership stake in the joint venture. SEN, licenses technology from Axcelis for ion implantation, has exclusive rights to the territory of Japan and is the leading producer of ion implantation equipment in Japan. In 2009, the merger between Axcelis Technologies and Sumitomo Heavy Industries dissolved—Sumitomo became the sole parent company, and with this, the company name changed to SEN Corporation.

SEN CORPORATION / SUMITOMO

The NV-GSD III-90 high-current ion implanter serving as the global standard, which achieved high throughput and a compact size with the adoption of a newly developed beam line.

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SEN CORPORATION / SUMITOMO

NV GSD III 90

High Current

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SEN CORPORATION / SUMITOMO

NV GSD III 90

SEN CORPORATION / SUMITOMO

NV GSD III 90

NV GSD III 90

High Current

Key Item Details

Description

Configuration

OEM Model Description

Documents

Similar Listings

SEN CORPORATION / SUMITOMO

NV GSD III 90

SEN CORPORATION / SUMITOMO

NV GSD III 90