Description
High Energy Implanter 1.2 MeVConfiguration
-Set up for Open 6 inch wafer cassette loading Seiko Seiki Pumps with Edwards rough pumps. CTi Cryos. ELS source - LINAC with resonators - Gas Box - PH3 SDS, BF3, Xe and Ar - StandardOEM Model Description
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AXCELIS
NV GSD/HE
CATEGORY
High Current
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
148407
Wafer Sizes:
6"/150mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
High Energy Implanter 1.2 MeVConfiguration
-Set up for Open 6 inch wafer cassette loading Seiko Seiki Pumps with Edwards rough pumps. CTi Cryos. ELS source - LINAC with resonators - Gas Box - PH3 SDS, BF3, Xe and Ar - StandardOEM Model Description
None ProvidedDocuments
No documents