Description

UNDOPED-POLY

Configuration

System Layout: Main , Utility System Type: L Type Side Maintenance: Installed System Paint Color: Ivory Furnace Front Surface Finish: SUS Heater Model: VOS-40-017 Rapid Cooling Unit: MISSING N2 Load Lock: - O2 Analyzer: Installed / LC750 Cassette I/O Type (Normal / SMIF): Normal I/O Type SMIF Maker / Model: Not Installed AGV Compatibility: Unable System Main Controller: WAVES Additional config details attached below.

OEM Model Description

The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.

Documents

TEL Alpha-8SE UNDOPED-POLY_Inspection+sheet_.pdf

TEL / TOKYO ELECTRON

ALPHA-8SE

Verified

Furnaces / Diffusion

Last Verified: Yesterday

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

138035

Wafer Sizes:

8"/200mm

Vintage:

2003

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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