Description

No description

Configuration

OEM: Tokyo Electron MODEL: Alpha-8S-D Process: O2 Anneal, Dry Oxide Controller/Software: TS4000ZE Reserved batch operation: Possible Number of Product Wafers: 150 Wafer Size: 200MM Wafer Shape: SNNF (Semi Notch No Flat) Wafer Cassette: 8" Plastic SMIF Interface : NO GAS Capabilities: N2, O2 Gas Pattern Panel: See Photo on Page 2 Heater Included Heater Zone: 5 zone Control Thermocouple: Paddle Max Temperature: 1100 C Place of control Thermocouple: between outer tube and inner tube Pump: NA Scrubber: None Pressure control: NA N2 Load Lock: No Boat rotation: No Spike TC’s and OT TC’s Included (5) End Effectors Included

OEM Model Description

The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options

Documents

ALPHA-8S Description.xlsx

ALPHA-8S Configuration.xlsx

TEL / TOKYO ELECTRON

ALPHA-8S

Verified

Furnaces / Diffusion

Last Verified: 4 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

127797

Wafer Sizes:

8"/200mm

Vintage:

1997

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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