Description
Install Type: Through-the-wall System Status: On-Line (operational at time of inspection) Wafer Production (AS IS): Yes - system can produce wafers in current condition Known Field Modifications: None All Cables Present: Yes Process Name: Oxide • Front Surface Finish: White • Process Pressure: Atmospheric • Number of Zones: 5 • Temperature Controller: Model 121 • Inner TC Type: In-line • Rapid Cooling Unit: No • Boat Rotation: Yes • Signal Lamp Tower: Yes • Gas Leak Detection: Yes Wafer Handling • Wafer Size: 8 inch (200 mm) • Wafer Type: Notch • Number of Slots: 26 • Bolt-On SMIF: No • Integrated SMIF: No • Stocker: 21-slot carrier • N2 Purge System: Yes Control & Software • System Controller: TS-4000Z • Software Version: V07.06 • Date of Last PM: 2020 (last use) • Temperature Range: 960 °C (max. 1025 °C) • FTP Heater: No Transfer & Sensing • Tube Seal: Lip Seal • Transfer Stage: Equipped • Wafer Position Sensor: Yes • Fork Wafer Present Sensor: Yes • Notch Alignment: No (function not in use) • Fork Wafer Position Sensor: YesConfiguration
ATM OxideOEM Model Description
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other optionsDocuments
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: 25 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
136981
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
ALPHA-8S
CATEGORY
Furnaces / Diffusion
Last Verified: 25 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
136981
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available