Description

TEL Alpha-8S LPCVD

Configuration

Asset Description: VERTICAL LPCVD FURNACE Software Version: TS-4000 CIM: SEC / GEM Process: LPCVD- POLY Handler System: Built in units (2) OK Factory Interface: SMIF (2) OK PUMP (1) OK

OEM Model Description

The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options

Documents

No documents

TEL / TOKYO ELECTRON

ALPHA-8S

Verified

Furnaces / Diffusion

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

128185

Wafer Sizes:

8"/200mm

Vintage:

1998

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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