Used KLA / SPTS VERSALIS fxP for Sale | Moov

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KLA / SPTS VERSALIS fxP

Description

No description

Configuration

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run the DRIE Bosch process.

OEM Model Description

Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.

Documents

No documents

KLA / SPTS

VERSALIS fxP

verified-listing-icon

Verified

CATEGORY

Etch/Asher

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

93301

Wafer Sizes:

8"/200mm

Vintage:

2018

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

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CATEGORY

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Last Verified: Over 30 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

93301

Wafer Sizes:

8"/200mm

Vintage:

2018

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run the DRIE Bosch process.

OEM Model Description

Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.

Documents

No documents

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