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KLA / SPTS VERSALIS fxP
    Description
    No description
    Configuration
    Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitride
    OEM Model Description
    Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
    Documents

    No documents

    KLA / SPTS

    VERSALIS fxP

    verified-listing-icon

    Verified

    CATEGORY
    Etch/Asher

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    75494

    Wafer Sizes:

    8"/200mm

    Vintage:

    2018

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    KLA / SPTS VERSALIS fxP

    KLA / SPTS

    VERSALIS fxP

    Etch/Asher
    Vintage: 2018Condition: Used
    Last VerifiedOver 60 days ago

    KLA / SPTS

    VERSALIS fxP

    verified-listing-icon
    Verified
    CATEGORY
    Etch/Asher
    Last Verified: Over 60 days ago
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/4dcb9bae71044605afb4c8446d0d58ae_e507bcb06baa431489d2944bbe3fbbc21201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/b57d11238dea4ff9be6ca5c0582b3cc6_9abd0fcf98d844a6b259e71c20354fa8_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/ad0e65269c804d13afd20cc7f8b50bc7_42e2122f9ed045d2a78fb7018f80fc67_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/45242916953f4d35a3190574a7a7c799_3ec5950fe9fd44489ffd119cd643299f1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/020df415f23545fba5c7a00af8a034b8_7279f3c372fd4e52a29cc818f17d0c7d1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/33e0fe6b5aaa4924a7cf0eaa792b5e93_10d35a5e966e400c83b1348c1c054890_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/5dc85829b9c340b8a4bcbec293009717_3d06613c210645fda71c3db4c054103a1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/c421d198895f46d9afa5a3b250de1cf6_7c10bc0e30904fa5849a9699b29630d31201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/8d4bc42c6dfc4964a437f6792dfb336f_0f0ea8ff72ce4f969ce337113314dbcc1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/2fa2bd98d9954507a3ae7e851f63b869_89a370a2084646558dae31919be3cf621201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/0f709dcc3c5f4f9da86e49f03dc2ae98_2eb6cc7639014bf4a649745aed538cc9_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/5876150c4dff497da9719f29d363fc07_d860993d5eda4272a4d48e9909f565881201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/989f061c5c034c338601ef4ff75c2fc0_50716d028d5b4d8c9a1d4a918333a2061201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/b0ae2b637ce04da18d3acf47fea2129f_bb09f506689d48babda1e4364ee989c71201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/b5e5cf5b956441ffbec819023ed7773c_13d016f78d854a8ebc80bc87a72437c41201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/7eac299691bf4c398081896aa7e329f7_0a6c13d0d3dc4839b2490215583e838c1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/1e79738bc44e4ae6a343bbf7998e425e_e1cadc505b8f44d5ab2c0f2aa3f4b4351201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/2729e6cbf395433fb387731e5eb9e778_f10e3a4901654af9af2e3129972c3f181201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/c026dd1baed240b18c4147db579569ab_2a600a51506d4153b5d306347c082f9a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/aaf76ebed6484f72bd1ede5223a12fae_3b72140045d7442aae464dde8c8273721201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/d894534c125e4c8792319822c5f01813_ec609191452140d5b0023cb0238d79b71201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/179a59b2083f4533b1caa7578c5bebf1_c794a583799041f9b605047f605acbf5_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/36a6b5eb37324ff2bc596fd356d13f81_187ebf79274d4a5aaafff820baf947f7_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/d78cf8ccded64fd693da7fa6ea8233dd_1176927193ac45c0ae283cd48a757c5d1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/0a69639918764f07880ef39ef4094e8b_2f64e34e3cba4745b60916d537bf1b751201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/2e74d61b5e8f478ea3ef0d763eac2557_244bda8dfee14aff8a838b51b7bb05bb_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/273705e5ef804e15baa33186795f0e71_6a8d70ff469446f88f2f4d45daf96dc1_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/2e099f4660784ccea689ca069323ea96_d8a4fb8661794696a3ff15a81147e487_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/9d4fcab0bf2948c29646c10044e74c76_7b4a8cd70c4640cc8ff02d12389d7e7a1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/fc4975b9d1b04e98abb91a8e869f78cb_4aeb700effd449118655b1297556887f_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/0243dcd3c26943d78980982b8cb0625a_50dbd294f0a34e7c9a7aa6ffd137fb091201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/a272f8cf959b46ab982feec662ce8fac_5be527ba16524ec48d05efdc5fd830e1_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/138c244fba494c098f18481da5aa21db_6ff91364f8394236892a7389a06c6a421201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/130f67b59d90471daec6ceac5c1ff1bd_d9ca843e6777415d8b10d1c5f5d299fe1201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/5ce705a68fc04b2e9705bc798cfc81e4_eb601b4297b749ad808e14ef84f70b081201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/c5a083b692ac4288999e6a7cccda8eca_4f762b8875bc435898316a39c2a886561201a_mw.jpeg
    listing-photo-72ac47e080554517b1e049ff3b0988fd-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/29839/72ac47e080554517b1e049ff3b0988fd/9f06b80e79614be58652abbd9009b75e_e58d4b9ec79c43ddbe164d80293b518b1201a_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    75494

    Wafer Sizes:

    8"/200mm

    Vintage:

    2018

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitride
    OEM Model Description
    Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
    Documents

    No documents

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    KLA / SPTS VERSALIS fxP

    KLA / SPTS

    VERSALIS fxP

    Etch/AsherVintage: 2018Condition: UsedLast Verified:Over 60 days ago