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KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
  • KLA / SPTS VERSALIS fxP
Description
No description
Configuration
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitride
OEM Model Description
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
Documents

No documents

KLA / SPTS

VERSALIS fxP

verified-listing-icon

Verified

CATEGORY
Etch/Asher

Last Verified: Over 60 days ago

Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

75494

Wafer Sizes:

8"/200mm

Vintage:

2018

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
KLA / SPTS VERSALIS fxP

KLA / SPTS

VERSALIS fxP

Etch/Asher
Vintage: 2018Condition: Used
Last VerifiedOver 60 days ago

KLA / SPTS

VERSALIS fxP

verified-listing-icon
Verified
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
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Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

75494

Wafer Sizes:

8"/200mm

Vintage:

2018

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No description
Configuration
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitride
OEM Model Description
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
Documents

No documents

Similar Listings
View All
KLA / SPTS VERSALIS fxP

KLA / SPTS

VERSALIS fxP

Etch/AsherVintage: 2018Condition: UsedLast Verified:Over 60 days ago