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6" Fab For Sale from Moov - Click Here to Learn More

ASM EPSILON E2000

Description

No description

Configuration

Brand : ASM America Type : EPSILON ONE, converted to E2000 Wafer size: 6” standard pitch/tall pitch ASM carriers, 8” compatible Bernoulli wand ATM reactor Gas system : TCS with ASM LVC, from separate LPE bubbler Diluted dopant flow for 1 line of N-dope and 1 line P-dope 5 port MPI injector Swing gate valve Software Vs 7.25.03 Host control.

OEM Model Description

The ASM Epsilon E2000 is a single-wafer epitaxy tool designed to accommodate various epitaxy applications. It covers a wide range of processes, including high-temperature silicon for wafer preparation and low-temperature selective or non-selective Silicon Germanium (SiGe) for creating transistor strain layers. The system is optimized for processing 150mm and 200mm wafers, offering flexibility and precision in epitaxial growth processes.

Documents

EPSILON E2000.mov

EPSILON E2000(4).mov

EPSILON E2000(2).mov

EPSILON E2000(6).mov

EPSILON E2000(3).mov

EPSILON E2000(5).mov

EPSILON E2000 Inspection Sheet.xlsx

ASM_EPSILON E2000.docx

ASM

EPSILON E2000

verified-listing-icon

Verified

CATEGORY

Epitaxial deposition (EPI)

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Installed / Idle

Product ID:

91299

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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Key Item Details

Condition:

Used

Operational Status:

Installed / Idle

Product ID:

91299

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

Brand : ASM America Type : EPSILON ONE, converted to E2000 Wafer size: 6” standard pitch/tall pitch ASM carriers, 8” compatible Bernoulli wand ATM reactor Gas system : TCS with ASM LVC, from separate LPE bubbler Diluted dopant flow for 1 line of N-dope and 1 line P-dope 5 port MPI injector Swing gate valve Software Vs 7.25.03 Host control.

OEM Model Description

The ASM Epsilon E2000 is a single-wafer epitaxy tool designed to accommodate various epitaxy applications. It covers a wide range of processes, including high-temperature silicon for wafer preparation and low-temperature selective or non-selective Silicon Germanium (SiGe) for creating transistor strain layers. The system is optimized for processing 150mm and 200mm wafers, offering flexibility and precision in epitaxial growth processes.

Documents

EPSILON E2000.mov

EPSILON E2000(4).mov

EPSILON E2000(2).mov

EPSILON E2000(6).mov

EPSILON E2000(3).mov

EPSILON E2000(5).mov

EPSILON E2000 Inspection Sheet.xlsx

ASM_EPSILON E2000.docx

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