Description
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120AConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
ULVAC
NE-950
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
79021
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
NE-950
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
79021
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120AConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents