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Description
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120AConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
79016
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ULVAC
NE-950EX
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
79016
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120AConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents