
Description
power 2 pump 4Configuration
Process Gas:CDA/P-N2/CF4/CHF3/Ar/He Process Chemical:OEM Model Description
Plasma Etching EquipmentDocuments
No documents
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130292
Wafer Sizes:
6"/150mm
Vintage:
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllTEL / TOKYO ELECTRON
UNITY IIE 655 PP
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130292
Wafer Sizes:
6"/150mm
Vintage:
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
power 2 pump 4Configuration
Process Gas:CDA/P-N2/CF4/CHF3/Ar/He Process Chemical:OEM Model Description
Plasma Etching EquipmentDocuments
No documents