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TEL / TOKYO ELECTRON UNITY M
    Description
    Transfer Module 3 x DRM - 200mm chambers AC rack - Turbo controller Seiko Seiki - ENI generators V2 ECC Rack SMC Chillers 2ea & controller AC box 1) Mainframe + AC box 2) DRM chamber #1 3) DRM chamber #2 + DRM chamber #3 4) RF rack with ENI Generators / Seiko Seiki turbo controllers 5) Cables / water lines, ETC Missing parts: 1 EPD Sensor
    Configuration
    TEL Unity M 8555DDD
    OEM Model Description
    The UNITY® is a plasma etch system that delivers world-class process results on a wide range of applications, including HARC, Dual Damascene, low-k dielectrics, poly gate, and shallow trench etch. It is designed to achieve excellent cost performance for the 130nm design rule and future technology generations. The UNITY® has various platforms, including the IIe, M, and Me, each designed to achieve higher productivity and reliability for specific applications. The UNITY® M model features high throughput, a compact design, and lower CoO (Cost of Ownership), as well as ease of maintenance. The UNITY® Me model includes a Flow Control System. The UNITY® IIe is available in 84, 85, and 88 models and features PE (IIe), IEM (IIe), DRM, and SCCM™ chambers.
    Documents

    No documents

    TEL / TOKYO ELECTRON

    UNITY M

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Deinstalled / Palletized


    Product ID:

    81929


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    TEL / TOKYO ELECTRON UNITY M

    TEL / TOKYO ELECTRON

    UNITY M

    Dry / Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    UNITY M

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-46681cd794b94e4291188989982dca8a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/48608/46681cd794b94e4291188989982dca8a/d7cd6560c6aa4595b618eaee24dea5d5_c0d7c73756054b92a26ec0e4a3057b401201a_mw.jpeg
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    listing-photo-46681cd794b94e4291188989982dca8a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/48608/46681cd794b94e4291188989982dca8a/d9b45f3a9466479aa51130c349a255d3_c4a05eede73e4e70afa0ccd56abe49201201a_mw.jpeg
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    listing-photo-46681cd794b94e4291188989982dca8a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/48608/46681cd794b94e4291188989982dca8a/a0190bb2df6946fe930dff13f4f119dc_e5a59584b6b347fc91351ee83826cd9e_mw.jpeg
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Deinstalled / Palletized


    Product ID:

    81929


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Transfer Module 3 x DRM - 200mm chambers AC rack - Turbo controller Seiko Seiki - ENI generators V2 ECC Rack SMC Chillers 2ea & controller AC box 1) Mainframe + AC box 2) DRM chamber #1 3) DRM chamber #2 + DRM chamber #3 4) RF rack with ENI Generators / Seiko Seiki turbo controllers 5) Cables / water lines, ETC Missing parts: 1 EPD Sensor
    Configuration
    TEL Unity M 8555DDD
    OEM Model Description
    The UNITY® is a plasma etch system that delivers world-class process results on a wide range of applications, including HARC, Dual Damascene, low-k dielectrics, poly gate, and shallow trench etch. It is designed to achieve excellent cost performance for the 130nm design rule and future technology generations. The UNITY® has various platforms, including the IIe, M, and Me, each designed to achieve higher productivity and reliability for specific applications. The UNITY® M model features high throughput, a compact design, and lower CoO (Cost of Ownership), as well as ease of maintenance. The UNITY® Me model includes a Flow Control System. The UNITY® IIe is available in 84, 85, and 88 models and features PE (IIe), IEM (IIe), DRM, and SCCM™ chambers.
    Documents

    No documents

    Similar Listings
    View All
    TEL / TOKYO ELECTRON UNITY M

    TEL / TOKYO ELECTRON

    UNITY M

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago