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TEL / TOKYO ELECTRON TE 5480
    Description
    Nitride Plasma Reactive Ion Etch
    Configuration
    1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working condition
    OEM Model Description
    None Provided
    Documents

    No documents

    TEL / TOKYO ELECTRON

    TE 5480

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    28958


    Wafer Sizes:

    6"/150mm


    Vintage:

    1992


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    TEL / TOKYO ELECTRON TE 5480

    TEL / TOKYO ELECTRON

    TE 5480

    Dry / Plasma Etch
    Vintage: 1992Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    TE 5480

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    28958


    Wafer Sizes:

    6"/150mm


    Vintage:

    1992


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Nitride Plasma Reactive Ion Etch
    Configuration
    1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working condition
    OEM Model Description
    None Provided
    Documents

    No documents

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