Description

TACTRUS VIGUS ATCC Excluded Items List (Pumps, Chillers & Abatement are all excluded) Description Quantity TM Robot Controller 1 PM1 TMP Controller 1 PM1 Lifter Pin Driver 1

Configuration

System Type Description Quantity Options System Nitrogen Purge Storage and Controller 1 Factory Interface FOUP 3 Handler System Loader Module YASKAWA Model (XURC845M-C00) 1 Main System VIGUS Ix BSP Chamber 6 Others

OEM Model Description

Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. It provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL. The system is designed to deliver excellent wafer uniformity, low wafer-to-wafer variation, and high selectivity for thin film stop layers while maintaining a high etch rate. Up to 6 Vigus™ chambers can be installed on the Tactras™ platform. Tactras™ Vigus™ contributes to maximizing productivity for semiconductor manufacturers with industry-leading tool availability by minimizing offset in machine-to-machine and chamber-to-chamber with robust design, particle reduction techniques, introducing unit-assembly inspection method before shipment, and unique labor-saving automated functions. Overall, Tactras™ Vigus™ is a highly efficient and versatile etching system that offers many benefits to its users.

Documents

TEL TOKYO ELECTRON TACTRAS VIGUS Configuration.pdf

TEL / TOKYO ELECTRON

TACTRAS VIGUS

Verified

Dry / Plasma Etch

Last Verified: 8 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

136515

Wafer Sizes:

12"/300mm

Vintage:

2014

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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