Description
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panelConfiguration
Gases in use: SF6, FR23, FR116, He, O2OEM Model Description
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TEGAL
903
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
58088
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEGAL
903
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
58088
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panelConfiguration
Gases in use: SF6, FR23, FR116, He, O2OEM Model Description
None ProvidedDocuments
No documents