TEGAL

Size Configuration: 6”, 150mm
Direct-Cooled Chamber 
3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds 
MKS 627A Heated Baratron
Dacscan P/N: 80-095-278, ISS 8 or Higher
Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher 
RF Generator: ENI ACG-10 (Re-Calibrated)-
4- Unit 8100 MFC’s-
1- Unit 8130 Pressure Controller-
1- Integrated Flat panel

20220518_102931.jpg

87E63493-0A41-4148-9AED-686D870B0A2D_1_201_a.jpeg

7BD49DDB-7C0F-43DC-B1F1-D96B8103CFB5.jpeg

EE379DBE-FC2E-4086-96E3-F840A2F38E1F_1_201_a.jpeg

4D73A2FE-0698-4582-97CC-591602F65D96.jpeg

0C858FB9-8877-48FF-8A6F-9061076BCFF5_1_201_a.jpeg

20220518_102848.jpg

20220518_102855.jpg

20220518_102634.jpg

image001 (16).jpg

image002 (6).jpg

image003 (2).jpg

image004 (5).jpg

image005 (3).jpg

image006 (3).jpg

image007.jpg

image008 (3).jpg

image009 (5).jpg

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

903

Category

Overview

Active Listings

Services

Top Listings

TEGAL

903

TEGAL

903

TEGAL

903

TEGAL

903

List it with Moov and find the perfect buyer in no time at all.

TEGAL

903