Description
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interfaceConfiguration
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM Model Description
None ProvidedDocuments
No documents
SHIBAURA
CDE 80
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
29599
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Main body. SMIF Loader Controller CRT Keyboard Through the wall SUS Front panel Al Side panel: Ni Coated Pump interfaceConfiguration
Gas system: (5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3 Quartz tube protection C mictube ESC Uni1.ersal chuck, 8" Water auxiliariesOEM Model Description
None ProvidedDocuments
No documents