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PLASMATHERM VERSALINE ETCH

Description

ICP Etch - 3 Chamber - All same process

Configuration

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM Model Description

None Provided

Documents

Plasmatherm Versaline ICP.pdf

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: 22 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

138075

Wafer Sizes:

6"/150mm

Vintage:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

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CATEGORY

Dry / Plasma Etch

Last Verified: 22 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

138075

Wafer Sizes:

6"/150mm

Vintage:

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

ICP Etch - 3 Chamber - All same process

Configuration

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM Model Description

None Provided

Documents

Plasmatherm Versaline ICP.pdf

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