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Description
production and running before deinstall in 2024. Compete tool with no missing parts.Configuration
PlasmaPro 100 Cobra Etching System -ESC lower electrode kit for 150mm notch wafer -Helium backing kit -Julabo FP51 chiller kit -5m conquer cable -RF600W generator & match for ETCH (AE Dressler) -Cobra300 3KW ICP plasma etch source (inc 3KW RF generator & amu) -100mT GM Gauge kit (Inficon) -PlasmaPro 100 Chamber and pump down pipe Heating Kit -Adixen ATH1600MT turbo, ISO200 pipework, APC & heated backing valve kit Pfeiffer A124H pump kit -10m pump cable -PlasmaPro 100 Pumping Foreline Heating Kit -Roughing only to Dry Pump - Isolation Valve included, No Turbo required -Adixen ACP15G dry pump kit -PlasmaPro 100 advanced single wafer loadlock kit, standard gas pod externally mounted (8 lines max), standard gasline and MFC for non-toxic gases -By-passed gasline and MFC for toxic gases, Gasline heating kit suitable for toxic gases, 5m Gas Pod Power cable -Variable wavelength Verity SD1024G optical EPD kitOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116408
Wafer Sizes:
Unknown
Vintage:
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 COBRA
CATEGORY
Dry / Plasma Etch
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116408
Wafer Sizes:
Unknown
Vintage:
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
production and running before deinstall in 2024. Compete tool with no missing parts.Configuration
PlasmaPro 100 Cobra Etching System -ESC lower electrode kit for 150mm notch wafer -Helium backing kit -Julabo FP51 chiller kit -5m conquer cable -RF600W generator & match for ETCH (AE Dressler) -Cobra300 3KW ICP plasma etch source (inc 3KW RF generator & amu) -100mT GM Gauge kit (Inficon) -PlasmaPro 100 Chamber and pump down pipe Heating Kit -Adixen ATH1600MT turbo, ISO200 pipework, APC & heated backing valve kit Pfeiffer A124H pump kit -10m pump cable -PlasmaPro 100 Pumping Foreline Heating Kit -Roughing only to Dry Pump - Isolation Valve included, No Turbo required -Adixen ACP15G dry pump kit -PlasmaPro 100 advanced single wafer loadlock kit, standard gas pod externally mounted (8 lines max), standard gasline and MFC for non-toxic gases -By-passed gasline and MFC for toxic gases, Gasline heating kit suitable for toxic gases, 5m Gas Pod Power cable -Variable wavelength Verity SD1024G optical EPD kitOEM Model Description
None ProvidedDocuments
No documents