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Description
ICP double ChmbaerConfiguration
Process chamber(ICP) X 2 Slit door X 2 Heater block X 2 Lift Pin X 2 Top plate X 2 Robot X 1 Shuttle X 1 Cassette nest X 1 Shuttle dump X 1 Loadlock X 1 Cooling cahmebr X 1 Operator Box X 1 Temp panel X 2 Gas panel X 2 Gas box X 2 Cassdoor X 1 ARM X 1 Paddle X 2 DC BOX X 1 AC BOX X 1OEM Model Description
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.Documents
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102019
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
HDD / Software:
Yes
Pumps:
NO
Process:
STRIP
Plasma Gas:
CF4,H2N2,O2,N2
Vintage:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATTSON
ASPEN II
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102019
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
HDD / Software:
Yes
Pumps:
NO
Process:
STRIP
Plasma Gas:
CF4,H2N2,O2,N2
Vintage:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available