Description
Etch / ashing systemConfiguration
Known issues: Not included: (Qty 2) LPT; (Qty 3) Dry Pump Main Tool Mattson Robot Arm Process: Photoresist Stripping Software Version: 5.56E3B CIM: GEMOEM Model Description
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.Documents
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MATTSON
ASPEN II
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154824
Wafer Sizes:
8"/200mm
Vintage:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Etch / ashing systemConfiguration
Known issues: Not included: (Qty 2) LPT; (Qty 3) Dry Pump Main Tool Mattson Robot Arm Process: Photoresist Stripping Software Version: 5.56E3B CIM: GEMOEM Model Description
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.Documents
No documents